Rackmount Process Analyzer

Specialty gas analysis

The OMA-406 Rackmount Analyzer uses a dispersive UV spectrophotometer for measuring the concentrations of fluorine, chlorine, hydrogen sulfide, sulfur dioxide, ammonia and other gas mixtures from ppm to percent levels. The full spectrum analysis of the OMA-406 enables a single analyzer to be calibrated for multiple ranges and for multiple analytes. Specialty gas manufacturers can leverage the versatility of the OMA-406 to simplify quality control procedures.

Measuring F₂/Cl₂ in excimer laser gas mixtures

Premixed cylinders containing blends of XeF or KrCl, for example, are produced by specialty gas companies for sale to companies that operate excimer lasers. The quality of the excimer laser gas cylinders must be closely monitored during their production. In addition, the mixed cylinder must be validated, and the halogen gas needs to be quantified.

The OMA-406 Rackmount Analyzer continuously outputs both F₂ and Cl₂ readings, providing new measurements approximately every 5 seconds. Response time is critical in the production of excimer laser gas mixtures in order to respond to sudden changes in product quality.

More applications

For other applications, visit the OMA Series.