Fluorine/Chlorine Measurements for Excimer Laser Gases

AAI is excited to bring new analytical technology to the specialty gas mixing and semiconductor fabricator industries with Fluorine/Chlorine measurements for Excimer Laser Gases.

Excimer lasers are used throughout the semiconductor and medical industries to perform tasks ranging from integrated circuit production to LASIK eye surgery. Excimer lasers operate by exciting a noble gas/reactive gas mixture, which produces laser light in the ultraviolet range. Fluorine and Chlorine are most commonly used as the reactive gas.

The OMA process analyzer is well suited for the measurement of either Fluorine or Chlorine by way of ultraviolet spectroscopy. This measurement can be considered by gas manufacturers for production and/or quality control of the gas mixture and by operators of the Excimer lasers for validation of the gas mixture and emissions monitoring.

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